Chongfan Technology
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13
2026
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04
Chip-Scale Image Sensor with Integrated MEMS Actuator
Author:
A team from Tsinghua University, comprising Xiaoguang Zhao, Fei Xing, and Zheng You, has reported a chip-scale image sensor incorporating a microelectromechanical systems (MEMS) actuator. By precisely modulating the position of the digital image sensor via the actuator, this sensor overcomes the limitation imposed by pixel size on the sampling period. The authors developed a theoretical model to characterize the sensor based on Fourier optics and fabricated it using microfabrication techniques. Compared with sensors that do not employ positional modulation, this device exhibits a spatial bandwidth product that is up to 33.7 times higher. Furthermore, the authors demonstrate that when integrated into a camera system, the sensor can enhance point-target localization accuracy and imaging resolution.
The research findings were published in Nature Electronics on April 7, 2026, under the title “A chip-scale image sensor integrated with a microelectromechanical system actuator.”
Figure 1: Design of MSEIS and the Principle of SBP Enhancement
Figure 2: Simulation Analysis of SBP Enhancement in MSEIS
Figure 3: Characterization of SBP Enhancement in the MSEIS Camera
Figure 4: Results of point-target measurement and imaging using the MSEIS camera
Source: Optical World
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