Chongfan Technology
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BAT-6001 Sensor Chip Batch Projection Lithography Machine
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Features: BAT-6001The sensor chip batch projection lithography machine can automatically complete the contour alignment, layer alignment, focus inspection and exposure of all samples in the sample plate, can adapt to all kinds of customized samples, with high batch efficiency, high degree of automation, high lithography quality, good exposure consistency, no matter after the sample plate. The equipment adopts humanized operation interface, good human-computer interaction function, simple operation and high stability. In addition, the equipment can provide a sample detection module for users to select, can automatically complete the sample defect detection and overlay precision detection, to provide a basis for the user's fine production.
Application field: The equipment can automatically complete the high-precision alignment of the outer edge contour of the sample, engrave the mask pattern in the center of the sample, and can be compatible with the inter-layer overlay in the traditional lithography process, and can be used for the production of micro-nano devices such as temperature sensors, pressure sensors, capacitive sensors, sound meter devices, etc.
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