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Single-axis flexible displacement stage, stroke 5mm

These stages have differential micrometer head drivers that provide both coarse and fine tuning. The user can also choose a piezoelectric actuator, with or without strain gauge feedback, for closed-loop and open-loop operation. Ideal for interference, microscopy and other precision nano-positioning applications.

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Parameters

Technical Data

Differential regulator displacement range: 5 mm

Optional 20 μm piezoelectric driver

NFL5DP20(/M): Open loop operation

NFL5DP20S(/M): with strain gauges for closed loop operation

Compact size: 3.00 inches (75mm) on a side, 1.18 inches (30mm) thick

XYZ axes are configurable

单轴挠性位移台

单轴挠性位移台

Single-axis flexible displacement stage, stroke 5mm

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