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Product Model/Name:

RGA100/200/300 Residual Gas Analyzer

CIS100/200/300 Closed Ion Source Residual Gas Analyzer

Product Details:

100,200 , and 300amu System  
Superior to 1amu the resolution
6 A dynamic range of one order of magnitude   ( RGA )
Detectable 5x10 -14 τ partial pressure ( RGA )
10 m τ operation ( CIS )
Real-time RGA Windows Software  
Mass spectrometry, leak detection, and pressure-versus-time measurements
Multi-head operating mode
Field-replaceable electron multiplier and filament
Rack-mounted computer system  

Gas analyzer

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